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Femtosecond Pulsed Laser Direct Writing System for Photomask Fabrication

机译:用于光掩模制​​造的飞秒脉冲激光直写系统

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摘要

Photomasks are the backbone of microfabrication industries. Currently they are fabricated by lithographic process, which is very expensive and time consuming since it is a several step process. These issues can be addressed by fabricating photomask by direct femtosecond laser writing, which is a single step process and comparatively cheaper and faster than lithography. In this paper we discuss about our investigations on the effect of two types of laser writing techniques, namely, front and rear side laser writing with regard to the feature size and the edge quality of the feature. It is proved conclusively that for the patterning of mask, front side laser writing is a better technique than rear side laser writing with regard to smaller feature size and better edge quality. Moreover the energy required for front side laser writing is considerably lower than that for rear side laser writing.
机译:光掩模是微细加工工业的骨干。目前,它们是通过光刻工艺制造的,由于它是一个多步工艺,因此非常昂贵且耗时。这些问题可以通过直接飞秒激光写入制造光掩膜来解决,这是一个单步过程,比光刻术便宜和快捷。在本文中,我们讨论了有关特征尺寸和特征边缘质量的两种激光写入技术(即正面和背面激光写入)效果的研究。最终证明,对于掩模的构图,就较小的特征尺寸和更好的边缘质量而言,正面激光写入是比背面激光写入更好的技术。此外,正面激光写入所需的能量明显低于背面激光写入所需的能量。

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