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Design of a novel 6-axis metrology system for meso-scale nanopositioners

机译:用于中尺度纳米定位器的新型6轴测量系统的设计

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摘要

The purpose of this research is to develop the best possible means and methods of building a six axis metrology system given cost and space constraints. Six axis measurements are a crucial part of precision engineering and characterizing machine performance, however commercially available sensors are not cost-efficient and are difficult to incorporate into meso-scale machines. The novel approach presented here uses three pairs of laser diodes and quadrant photodiodes to achieve six axis measurements. This paper presents a general parametric model that can predict the output of the photodiodes due to translations and rotations of the target for any geometry of the system. The device has performance characteristics of translational resolution in the range of microns depending on the geometry of the system, a bandwidth of 17.5 MHz, and dominant noise in the sensor of ±1.6 nm. This device will be useful in a variety of applications including nanomanufacturing, bio instrumentation, Dip Pen Nanolithography, AFM, and many more.
机译:本研究的目的是在给定成本和空间限制的情况下,开发构建六轴计量系统的最佳可能方法。六轴测量是精密工程和表征机器性能的关键部分,但是,市售的传感器并不具有成本效益,并且难以整合到中规模机器中。这里介绍的新颖方法使用三对激光二极管和象限光电二极管来实现六轴测量。本文提出了一个通用的参数模型,该模型可以预测由于目标对于系统的任何几何形状的平移和旋转而产生的光电二极管的输出。该器件的平移分辨率的性能特征取决于系统的几何尺寸,范围为微米,带宽为17.5 MHz,传感器中的主要噪声为±1.6 nm。该设备将在各种应用中有用,包括纳米制造,生物仪器,浸笔纳米光刻,AFM等。

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