Fabrication process for openable microfluidic devices and externally actuated microfluidic switch

摘要

In this document I discuss the fabrication of metallic, aluminum and aluminum oxide, 3D micro channels, made with standard milling technology, along with two channel closing methods for openable devices: half cured-glued PDMS and Pressure Sensitive Adhesive (PSA) Film. Using the aluminum oxide coated micro channels, along with the half cured-glued PDMS process to close the channels and external fast speed valves for actuation, a microfluidic switch for cell sorting capable of operating at 48 Hz was designed, fabricated and tested. The use of aluminum as a channel substrate provides channel strength and short heat dissipation times, and the use of aluminum oxide enhances light energy absorption, which provides the possibility of further laser actuation. Also, the combination of micro fabrication process and actuation technique makes possible the further scaling and handling of large cells as cardiocytes.