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Towards nanoimprint lithography on free-form surfaces: A global/local modelling approach for predicting the deformation of the flexible stamp

机译：在自由曲面上进行纳米压印光刻：用于预测柔性印模变形的全局/局部建模方法

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Sonne Mads Rostgaard; Smistrup K.; Hattel Jesper Henri;
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年度 2014
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正文语种 eng
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1. Modeling and simulation of the deformation process of PTFE flexible stamps for nanoimprint lithography on curved surfaces [J] . Sonne M. R., Smistrup K., Hannibal M., Journal of Materials Processing Technology . 2015,第Null期

机译：用于曲面纳米压印光刻的PTFE柔性印章变形过程的建模和仿真
2. Predictive models of the local and the global polished profiles in deterministic polishing of free-form surfaces [J] . Cheng Fan, Ji Zhao, Lei Zhang, Proceedings of the Institution of Mechanical Engineers, Part B. Journal of engineering manufacture . 2014,第8期

机译：自由形状表面的确定性抛光中局部和全局抛光轮廓的预测模型
3. CLOSED FREE-FORM SURFACE GEOMETRICAL MODELING A NEW APPROACH WITH GLOBAL AND LOCAL CHARACTERIZATION [J] . JEAN-LUC MARI, JEAN SEQUEIRA International Journal of Image and Graphics . 2004,第2期

机译：封闭的自由曲面几何建模，具有全局和局部特征的新方法
4. Refined Coarse-Grain Modeling of Stamp Deformation in Nanoimprint Lithography [C] . S. Merino, A. Retolaza, A. Juarros, NSTI BioNano Conference and Trade Show . 2008

机译：纳米压印光刻中的精制粗晶模型
5. Understanding Material Deformation Mechanism in Nanoimprint Lithography for Engineering and Medical Applications [D] . Gaikwad, Abhaysinh. 2020

机译：了解工程和医疗应用纳米压印光刻材料变形机制
6. Resist Filling Study for UV Nanoimprint Lithography Using Stamps with Various Micro/Nano Ratios [O] . Minqi Yin, Hongwen Sun, Haibin Wang 2018

机译：使用具有各种微/纳米比的印模进行的紫外线纳米压印光刻的抗蚀剂填充研究
7. Towards nanoimprint lithography on free-form surfaces: A global/local modelling approach for predicting the deformation of the flexible stamp [O] . Sonne Mads Rostgaard, Smistrup K., Hattel Jesper Henri 2014

机译：在自由曲面上进行纳米压印光刻：用于预测柔性印模变形的全局/局部建模方法

Towards nanoimprint lithography on free-form surfaces: A global/local modelling approach for predicting the deformation of the flexible stamp

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