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Distance measurements by speckle correlation of objective speckle patterns, structured by the illumination

机译:通过由照明构造的客观散斑图案的散斑相关性的距离测量

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摘要

Objective speckles produced by two beams overlapping and interfering on a rough object surface contain information about the angle of incidence of the two beams, and how well they overlap. We obtain the autocovariance function for such a speckle pattern, and demonstrate how the information carried by the objective speckles can be used to probe the distance between the object and the observation plane. From a distance of 75 mm to a distance of 150 mm, and using an angle of 0.3 deg between the two incident beams, we can measure the actual distance with an uncertainty of better than ±0.1% of the full range. As long as the beams overlap at the object surface, the proposed method can measure distance with an uncertainty inversely proportional to the spot size at the object.
机译:由两个光束重叠并干涉在粗糙物体表面上产生的物镜斑点包含有关两个光束的入射角及其重叠程度的信息。我们获得了这种散斑图案的自协方差函数,并演示了如何利用物镜散斑携带的信息来探测物体与观察平面之间的距离。从75毫米的距离到150毫米的距离,并且使用两个入射光束之间的角度为0.3度,我们可以测量实际距离,其不确定性优于整个范围的±0.1%。只要光束在物体表面重叠,所提出的方法就可以测量距离,其不确定性与物体上的光斑大小成反比。

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