Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions and display ultrasensitive mass detection in air. A mass sensitivity of 4 ag/Hz has been determined in air by placing a single glycerine drop, having a measured weight of 57 fg, at the apex of a cantilever and subsequently measuring a frequency shift of 14.8 kHz. CMOS integration enables electrostatic excitation, capacitive detection, and amplification of the resonance signal directly on the chip. (c) 2005 American Institute of Physics.
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机译：纳米机械谐振器已单片集成在预处理的互补金属氧化物半导体（CMOS）芯片上。预制的谐振器系统已被设计为具有高达1.5 MHz的谐振频率。该系统的特点是在环境空气和真空条件下显示空气中的超灵敏质量检测。通过在悬臂的顶点放置一个单滴甘油溶液（测得的重量为57 fg），然后测量14.8 kHz的频移，已在空气中确定4 ag / Hz的质量敏感性。 CMOS集成可直接在芯片上进行静电激励，电容检测和谐振信号放大。 （c）2005年美国物理研究所。
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