We propose and demonstrate tunable microwave phase shifters based on electrically tunable silicon-on-insulator microring resonators. The phase-shifting range and the RF-power variation are analyzed. A maximum phase-shifting range of 0~600° is achieved by utilizing a dual-microring resonator. A quasi-linear phase shift of 360° with RF-power variation lower than 2dB and a continuous 270° phase shift without RF-power variation at a microwave frequency of 40GHz are also demonstrated.
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