Surface Nitridation of Titanium Particles by Polygonal-Barrel Plasma Treatment System

摘要

We demonstrated surface nitridation of titanium particles using the polygonal barrel-plasma treatment system. In order to verify the formation of TiN, a Ti plate was treated in our plasma treatment system. The color of the Ti plate changed from metallic to gold as a result of N_2 plasma treatment. Glow discharge optical emission spectrometry of the plasma-treated Ti plate confrrmed that nitrogen was inserted. From XPS measurements, it was also found that the nitrogen in the sample was ascribed to the formation of Ti-N bonds. It should be noted that the X-ray diffraction patterns of the Ti plate before and after the plasma treatment showed only the reflection peaks of Ti metal, supporting that the Ti-N bond formation occurred only on the surface of the plate. Subsequently, N_2 plasma treatment was applied to Ti particles. The plasma treatment using a swinging motion of the barrel containing Ti particles changed the color of the particles uniformly from gray to brown. The UV-VIS absorbance spectrum of the plasma-treated Ti particles was similar to that of the plasma-treated Ti plate. This result was considered a proof of the Ti-N bond formation on Ti particles achieved by the polygonal-barrel plasma treatment system.