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On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

机译:铌酸锂微谐振器的片上电光调谐   集成的平面微电极

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摘要

We demonstrate electro-optic tuning of an on-chip lithium niobatemicroresonator with integrated in-plane microelectrodes. First two metallicmicroelectrodes on the substrate were formed via femtosecond laser process.Then a high-Q lithium niobate microresonator located between themicroelectrodes was fabricated by femtosecond laser direct writing accompaniedby focused ion beam milling. Due to the efficient structure designing, highelectro-optical tuning coefficient of 3.41 pm/V was observed.
机译:我们展示了集成了平面内微电极的片上铌酸锂微谐振器的电光调谐。通过飞秒激光工艺在基板上形成前两个金属微电极,然后通过飞秒激光直接写入并结合聚焦离子束铣削制造位于微电极之间的高Q铌酸锂微谐振器。由于有效的结构设计,可以观察到3.41 pm / V的高电光调谐系数。

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