On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

摘要

We demonstrate electro-optic tuning of an on-chip lithium niobatemicroresonator with integrated in-plane microelectrodes. First two metallicmicroelectrodes on the substrate were formed via femtosecond laser process.Then a high-Q lithium niobate microresonator located between themicroelectrodes was fabricated by femtosecond laser direct writing accompaniedby focused ion beam milling. Due to the efficient structure designing, highelectro-optical tuning coefficient of 3.41 pm/V was observed.