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>Development of a solderbump technique for contacting a three-dimensional multi electrode array
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Development of a solderbump technique for contacting a three-dimensional multi electrode array
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机译:用于接触三维多电极阵列的焊球技术的发展
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摘要
The application of a solder bump technique for contacting a multi electrode sensor/actuator system is presented. Techniques adapted from the literature could successfully be scaled down to 55×55 ¿m bumps at 120 ¿m heart-to-heart spacing
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