首页> 外文OA文献 >Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al₂O₃ Thin Films

【2h】

Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al₂O₃ Thin Films

机译：原子层沉积Al _{2 O _{3 薄膜增强工程纸的阻隔性能}}

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
Mirvakili Mehr Negar; Bui H.V.; van Ommen J.R.; Hatzikiriakos Savvas G.; Englezos Peter;
展开▼
作者单位

展开▼
年度 2016
总页数
原文格式 PDF
正文语种 eng
中图分类

相似文献

外文文献
中文文献
专利

1. Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films [J] . Mirvakili Mehr Negar, Van Bui Hao, van Ommen J. Ruud, ACS applied materials & interfaces . 2016,第21期

机译：原子层沉积Al2O3薄膜增强工程纸的阻隔性能
2. Evaluation of integrity and barrier performance of atomic layer deposited WN_xC_y films on plasma enhanced chemical vapor deposited SiO_2 for Cu metallization [J] . Ki-Su Kim, Moon-Sang Lee, Sung-Soo Yim, Applied Physics Letters . 2006,第8期

机译：等离子体增强化学气相沉积SiO_2上用于铜金属化的原子层沉积WN_xC_y膜的完整性和阻挡性能的评估
3. Enhanced Performance of Atomic Layer Deposited Thin-Film Transistors With High-Quality ZnO/Al2O3 Interface [J] . Li Huijin, Han Dedong, Dong Junchen, IEEE Transactions on Electron Devices . 2020,第2期

机译：具有高质量ZnO / Al2O3接口的原子层沉积薄膜晶体管的增强性能
4. Atomic layer deposited tungsten nitride thin film as a contact barrier layer for sub-80 nm dynamic random access memory [C] . Soo-Hyun Kim, Jun-Ki Kim, Nohjung Kwak, Advanced Metallization Conference . 2006

机译：原子层沉积钨氮化物薄膜作为亚80nm动态随机存取存储器的接触阻挡层
5. Novel protective coatings for silver and copper alloy cultural heritage objects using atomic layer deposited metal oxide barrier films. [D] . Marquardt, Amy E. 2015

机译：用于银和铜合金文化遗产物体的新型保护涂层，使用原子层沉积的金属氧化物阻挡膜制成。
6. A Comparative Study on the Ferroelectric Performances in Atomic Layer Deposited Hf0.5Zr0.5O2 Thin Films Using Tetrakis(ethylmethylamino) and Tetrakis(dimethylamino) Precursors [O] . Baek Su Kim, Seung Dam Hyun, Taehwan Moon, 2020

机译：四（乙基甲基氨基）和四（二甲基氨基）前体在原子层沉积Hf0.5Zr0.5O2薄膜中铁电性能的比较研究
7. Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al₂O₃ Thin Films [O] . Mirvakili Mehr Negar (author), Bui H.V. (author), van Ommen J.R. (author), 2016

机译：原子层沉积Al _{2 O _{3 薄膜增强工程纸的阻隔性能}}

Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films

著录项

引文网络

相似文献

相关主题

期刊订阅

Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al₂O₃ Thin Films