udGrazing incidence X-ray diffraction (GIRXD) study of the phase composition of SiC (x) Fe (y) and SiC (x) N (y) Fe (z) thin filmsud

摘要

Films of various composition are synthesized by chemical vapor deposition under low pressure using the thermal decomposition of the following initial gas mixtures: ferrocene Fe(C5H5)(2) and helium; ferrocene, tris(diethylamino)silane [(C2H5)(2)N](3)SiH (TDEAS) and helium; ferrocene, 1,1,1,3,3,3-hexamethyldisilazane [(CH3)(3)Si](2)NH (HMDS), and helium. The chemical composition of the films obtained is analyzed by FTIR and Raman spectroscopies. The phase composition of the films is studied by grazing incidence X-ray diffraction (GIXRD). It is determined that the films grown from the gas mixtures of organiosilicon compounds (TDEAS or HMDS), ferrocene, and helium have the same chemical and phase composition (SiC (x) N (y) Fe (z) ), while the films obtained from the mixture of ferrocene and helium have another composition (SiC (x) Fe (y) ).