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Fabrication of x-ray spiral masks by laser ablation

机译:通过激光烧蚀制造X射线螺旋掩模

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摘要

The manipulation of x-rays by phase structures is becoming more common through devices such as compound refractive lenses, blazed zone-plates and other structures. A spiral phase modulation structure can be used to condition an x-ray beam to produce an x-ray vortex. An x-ray beam in this form can be used as the first step towards a self-collimating beam. Also it can be used as a controllable pathological feature in studies of x-ray phase retrieval. We describe the microfabrication of a spiral phase modulation structure by excimer laser ablation. A multi-step fabrication using 15 separate chrome-on-quartz mask patterns is used to create a 16 step spiral staircase structure approximately the desired spiral ramp. The results of simulations and initial experimental results are presented.
机译:通过诸如复合折射透镜,闪耀的波带片和其他结构的装置,通过相结构来操纵X射线变得越来越普遍。螺旋相位调制结构可用于调节X射线束以产生X射线涡旋。这种形式的X射线束可以用作朝向自准直束的第一步。它也可以用作X射线相位恢复研究中的可控病理特征。我们描述了准分子激光烧蚀的螺旋相位调制结构的微细加工。使用15个独立的石英上铬掩膜图案的多步骤制造用于创建16步螺旋楼梯结构,近似于所需的螺旋坡道。给出了仿真结果和初步实验结果。

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