A new method for measuring the vacuum leakage of a pressure sensor proposed by the present authors has been improved so that it can be applied for industrial use. The principle of this method is based on the discharge characteristic called Pashen’s law. The main improved points are reduction of fluctuation of the discharge potential and extension of the measurable pressure range. As a result, a leakage rate of 1×10‐5 Pa cm3 s-1 can be detected within a day. This sensitivity is comparable to that of the radio-isotope method now in practical use or even higher than that. The measurable pressure range is enlarged from 70-150 Pa to 70 Pa to a few hundreds pascals by employing He gas detect the leakage.
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机译：本发明人提出了一种测量压力传感器的真空泄漏的新方法，该方法已得到改进，可用于工业用途。该方法的原理基于称为帕申定律的放电特性。主要的改进点是减少了放电电位的波动并扩大了可测压力范围。结果，一天之内可以检测到1×10-5 Pa cm3 s-1的泄漏率。该灵敏度与现在实际使用的放射性同位素方法相当，甚至更高。通过使用氦气检测泄漏，可测量的压力范围从70-150 Pa扩大到70 Pa至数百帕。
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