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Magnetically enhanced hollow cathode - a new plasma source for high-rate deposition processes

机译：磁性增强空心阴极 - 一种用于高速沉积过程的新型等离子体源

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Fietzke F.; Morgner H.; Günther S.;
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年度 2009
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1. “Magnetically enhanced hollow cathode—a new plasma source for high-rate deposition processes” [J] . Fred Fietzke, Henry Morgner, Steffen GÜnther Plasma processes and polymers . 2009,第Supplementa1期

机译：“磁性增强的空心阴极-一种用于高速沉积工艺的新型等离子体源”
2. Enhanced hollow cathode plasma source for assisted low pressure electron beam deposition processes (vol 267, pg 105, 2015) [J] . Child David, Gibson Des, Placido Frank, Surface & Coatings Technology . 2017,第期

机译：增强的空心阴极等离子体源用于辅助低压电子束沉积过程（Vol 267，PG 105,2015）
3. Enhanced hollow cathode plasma source for assisted low pressure electron beam deposition processes [J] . Child David, Gibson Des, Placido Frank, Surface & Coatings Technology . 2015,第Null期

机译：增强型空心阴极等离子体源，用于辅助低压电子束沉积工艺
4. Enhanced Hollow Cathode Plasma Source for Low Pressure Electron-Beam Deposition Processes [C] . D. Child, D. Gibson, F. Placido, Society of Vacuum Coaters annual technical conference . 2014

机译：增强型空心阴极等离子体源，用于低压电子束沉积工艺
5. HOLLOW CATHODE, MAGNETIC MULTIPOLE ION SOURCES FOR NEUTRAL BEAM INJECTION [D] . GOEBEL, DAN MICHAEL 1981

机译：中空注入的空心阴极，磁性多极离子源
6. Numerical Simulations and the Design of Magnetic Field-Enhanced Electron Impact Ion Source with Hollow Cylinder Structure [O] . Guochen Qi, Di Tian, Guolun Gao, 2020

机译：空心圆柱结构的磁场增强电子碰撞离子源的数值模拟与设计
7. Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition [O] . Zachary C. Sobell, Andrew S. Cavanagh, David R. Boris, 2021

机译：中空阴极等离子体电子源通过电子增强原子层沉积进行低温沉积钴膜

Magnetically enhanced hollow cathode - a new plasma source for high-rate deposition processes

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