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Iridium coatings with titanium sub-layer deposited by RF magnetron sputtering: Mechanical properties and contact behavior with RoHS-compliant glass melt

机译：通过RF磁控溅射沉积钛子层的铱涂层：符合RoHs标准的玻璃熔体的机械性能和接触性能

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Hagen J.; Burmeister F.; Fromm A.; Manns P.; Kleer G.;
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年度 2009
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2. Iridium Coatings with Titanium Sub-Layer Deposited by RF Magnetron Sputtering: Mechanical Properties and Contact Behavior with RoHS-Compliant Glass Melt [J] . Jan Hagen, Frank Burmeister, Alexander Fromm, Plasma processes and polymers . 2009,第Supplementa1期

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Iridium coatings with titanium sub-layer deposited by RF magnetron sputtering: Mechanical properties and contact behavior with RoHS-compliant glass melt

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