Fabrication of ferromagnetic and antiferromagnetic chromium oxides by organometallic chemical vapor deposition

摘要

We have been able to fabricate CrO2 and Cr2O3 from ultraviolet photolytic and plasma-assisted decomposition of Cr(CO) 6 in an oxygen carrier gas. The composition of these films is uniform in composition and contains little contamination. Using magneto-optic Kerr effect measurements, we have been able to demonstrate that the CrO2 films are ferromagnetic.