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Orientation of self-assembled block copolymer cylinders perpendicular to electric field in mesoscale film

机译:自组装嵌段共聚物圆柱的取向垂直于中尺度薄膜中的电场

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摘要

The possibility of using self-assembled films of block polymers as templates to fabricate nanoscale structures for devices has attracted great attention towards this class of material. Self-assembly of a block copolymer can be directed by using an electric field to orient features (i.e., ~10-nm-diam cylinders) parallel to the electric field, making the material more attractive as a nanoscale lithography mask. In this letter we describe an approach to influence the electric field orientation phenomena by interfacial effects. As a result, the 15-nm-diam polystyrene cylinders of the polystyrene–polyisoprene–polystyrene triblock copolymer orient perpendicular to the electric field. The described approach along with the previous method can produce a directed self-assembly to fabricate complex nanoscale structures with orthogonally oriented nanoscale width lines.
机译:使用嵌段聚合物的自组装膜作为模板来制造器件的纳米级结构的可能性引起了对这类材料的极大关注。嵌段共聚物的自组装可以通过使用电场来定向以平行于电场定向特征(即,直径约10nm的圆柱体),从而使该材料作为纳米级光刻掩模更具吸引力。在这封信中,我们描述了一种通过界面效应影响电场取向现象的方法。结果,聚苯乙烯-聚异戊二烯-聚苯乙烯三嵌段共聚物的15纳米直径的聚苯乙烯圆柱体垂直于电场取向。所描述的方法与先前的方法可以产生定向的自组装,以制造具有正交取向的纳米级宽度线的复杂纳米级结构。

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