Reconfigurable laser micro-processing systems: development of generic system-level tools for implementing modular laser micro-manufactoring platforms

摘要

Laser micro-machining (LMM) is an attractive manufacturing technology for the fabrication of a wide range of micro-components due to its intrinsic processing attributes. In addition, LMM can be integrated in hybrid manufacturing platforms and thus to combine LMM with other complementary processes for the cost effective fabrication of a broader range of miniaturised products. Nevertheless, the broader industrial uptake of LMM is still to come due to system-level issues in designing and implementing LMM systems. udIn this context, the research reported in this thesis is aimed at improving the system-level performance of reconfigurable LMM platforms and thus to create the necessary pre-requisites for achieving a much better machining accuracy, repeatability and reproducibility (ARR) in different processing configurations. First, a systematic approach for assessing and characterizing the manufacturing capabilities of LMM platforms in terms of ARR is proposed. Then, the development of generic integration tools for improving the system-level performance of reconfigurable LMM platforms in terms of manufacturing flexibility and reliability both as stand-alone machine tool configurations and also as component technologies in multi-process manufacturing solutions is presented. Next, generic software tools are proposed and validated for improving the manufacturing capabilities of LMM systems for realizing complex multi-axis laser processing strategies with a closed-loop manufacturing control. Finally, the integration of LMM in process chains is validated to extend the capabilities of well proven conventional manufacturing routes, i.e. micro milling, for the fabrication of miniaturised products, i.e. Terahertz technology devices, which have complex and challenging-to-fabricate functional features and overall designs.