Modelling and performance evaluation of coupled micro resonator array for artificial nose

摘要

This research presents a new sensor structure, the coupled micro resonator array (CMRA) as an approach to reduce the complexity of large artificial nose sensing system. The aim is to exploit multiple resonant sensors with a simplified readout. The CMRA working principle is based on mass loading frequency response effect; the frequency response of the coupled resonators is a signature for the multiple sensors. The key research outputs are balanced effective mass of the coupled resonators for measurable response and broke the structure symmetry for unique frequency response pattern and stable structure eigenvectors to enhance the system odour discrimination. To develop the CMRA, the structure is modelled and analysed using finite element and lumped mass analysis. Using silicon-on-insulator material, the CMRA is fabricated in order to evaluate the performance. The effect of mass loading is tested by platinum mass deposition using focused ion beam technology (FIB). The inverse eigenvalue analysis was used to estimate the mass change pattern of the CMRA structure. The research also investigates effect of the manufacturing variations on the CMRA structure performance. With the finger print of the coupled frequency response, the output signal of N multiple resonant sensors is monitored by a single processor; hence, reducing the complexity of readout and signal processing system.