Fabrication of ceramic and ceramic composite microcomponents using soft lithography

摘要

This PhD project is set out to develop a high precision ceramic fabrication approach suitable for mass production, and to meet the needs of microengine application. A group of new processes have been developed and the results are characterized for fabrication of high precision ceramic oxides and composite microcomponents using soft lithography and colloidal powder processing. The materials chosen in the research are alumina, yttria stabilised zirconia and their composite for their excellent properties at high temperature.