In recently years, micromachining technology and biomedical are integrating with each other has provided us great convenient on many applications such as gene chip, drug delivery, nucleic acid synthesis etc. How to efficient and rapid transportation of microfluids has been a challenging for biomedical technology; follow by the rapid development of Micro-Electro-Mechanical – Systems and biomedical engineering. . United States of America has become one of the most potential technologies due to the demand of the medical examination and test increase step by step. But In nowadays, some of countries still used large traditional machine for medical tests, it may be a hindrance for obtain bio-information. If BioMEMS technology used more widely, have very positive consequences as a whole. And less required sample for diagnostics, as well as lower reagents costs. Faster response times and process control due to short diffusion distances. It also can be safer platform for biological studies because of integration of functionality, smaller fluid volumes and energies. Another advantage is that lower fabrication costs, easier mass production and allowing cheap disposable chips. Thus, develop low costs devices with stable performance and portability and was able to meet the need of medical detection is the most urgent task. How fast and effective delivery fluid can be challenging in MEMS technology. Many research of micropump micropump have been published one after another. Such like Electro osmotic micropumps, piezoelectric micropumps, Pneumatic micropumps, Magnetic micropumps…etc. Pneumatic is the one of surest and quickest method. In this poster, the design and simulation of a MEMS thermal actuated micropump is reported. The micropump consists of a microfludic chamber on top of a thermal actuation chamber. The PDMS (Polydimethysioxane) membranes are activated pneumatically by air pressure which generates a rapid transporting of microfluids to target. The working principle of the micropump is analyzed in detail. Based on the theoretical analysis, a set of optimized design parameters of the micropump are suggested. Simulation is used to verify the function of the micropump. Compared to traditional methods, this MEMS thermal actuated micropump has some advantages, like low costs, more easy mass production. If integrate with testing chip...etc. It could provide a useful tool for biomedical field and be crucial for micro total analysis system. Bio-chip is kinds of modern high-tech chip. It integrate laboratory’s functions on miniature chip that usually made by silicon chips and glass. It can be divided into two groups. That are “lab on a chip” and” Micro array”. Microfluidics technology is a very important part of bio-chip. In micro scale, surface area volume ratio and forces within the Atom increase because tiny size and geometry. In this situation, fluid resistances also increase in micro channel. Thus, driving force is necessary for fluid acting in micro channel. It is one of the motivations. Another goal is formulate a micro pump that has the advantages of convenient arrangement and usage, time saving, and material saving; in order to reduce the cost and consider the possibility of disposable chip. This paper used the Polydimethylsiloxane for basic materials. They have some advantages like high biocompatibility, high light transmission and producing simple.
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