Pd/Cr Gates for a MIS Type Hydrogen Sensor

摘要

Instead of the pure Pd gates in MIS type hydrogen sensor, Pd-Cr alloy gates with different composition and structure were used to improve the sensors performance. The use of Pd-Cr alloy not only extended the dynamic range from 100 ppm to 50,000 ppm of hydrogen, but also showed quick response. The dynamic range and sensitivity were related to the nature of metal outer surface and the metal/insulator interface respectively.