Low-loss silicon wire waveguides with 3-D tapered couplers fabricated by self profile transformation

摘要

[[abstract]]© 2007 Institute of Electrical and Electronics Engineers-A novel low-loss silicon wire waveguide as well as 3-D tapered couplers is demonstrated by self profile transformation for the first time. The preliminary experimental results show the propagation loss is 2 dB/cm and the coupler loss is 2.7 dB.