Small signal electron charge centroid model for quantization of inversion layer in a metal-on-insulator field-effect transistor

摘要

[[abstract]]A simulator using a coupled Schrödinger equation, Poisson equation and Fermi-Dirac statistics to analyze inversion layer quantization is shown to match the measured capacitance versus voltage data of thin oxide gate metal-on-insulator capacitance closely. The effects of bias voltage, oxide thickness and doping concentration on the charge centroid are presented. A simple empirical model for the alternating current charge centroid of the inversion layer is proposed. This model predicts the in-version layer capacitance or charge centroid in terms of Tox (oxide thickness), Vt (threshold voltage), and Vg (gate voltage) explicitly