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Thermal stability and microstructure characterization of CrN/WN multilayer coatings fabricated by ion-beam assisted deposition

机译:离子束辅助沉积制备的CrN / WN多层涂层的热稳定性和微观结构表征

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摘要

[[abstract]]CrN/WN multilayer coatings were deposited on both silicon (100) and stainless steel substrate by the ion-beam assisted deposition. The bilayer periods were designed and controlled in the range from 3 nm to 30 nm. The CrN/WN films were annealed from 750 °C to 850 °C for 1 and 4 h in vacuum to evaluate the thermal stability of these coatings. The difference of microstructural characterization between the CrN/WN multilayer coating and the CrN single layer coating was investigated by scanning electron microscopy. The phase transformation after annealing was probed by X-ray diffraction. The hardness of as-deposited CrN/WN coating with 8 nm bilayer period was much higher than that of CrN and WN single layers. The thermal stability of CrN/WN multilayer coatings with different bilayer periods was also discussed in correlation to the associated microstructural evolution.
机译:通过离子束辅助沉积将[[抽象]] CrN / WN多层涂层沉积在硅(100)和不锈钢基板上。设计双层周期并将其控制在3nm至30nm的范围内。 CrN / WN薄膜在真空中从750°C到850°C退火1和4 h,以评估这些涂层的热稳定性。通过扫描电子显微镜研究了CrN / WN多层涂层与CrN单层涂层之间的微观结构特征差异。通过X射线衍射探测退火后的相变。双层周期为8 nm的沉积CrN / WN涂层的硬度比CrN和WN单层的硬度高得多。还讨论了具有不同双层周期的CrN / WN多层涂层的热稳定性,并与相关的微结构演变相关。

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    Yan-Zuo Tsai;

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  • 年度 2011
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  • 原文格式 PDF
  • 正文语种 [[iso]]en
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