首页> 外文OA文献 >Comparison of microstructure and phase transformation for nanolayered CrN/AlN and TiN/AlN coatings at elevated temperatures in air environment
【2h】

Comparison of microstructure and phase transformation for nanolayered CrN/AlN and TiN/AlN coatings at elevated temperatures in air environment

机译:空气环境中高温下纳米CrN / AlN和TiN / AlN涂层的微观结构和相变的比较

代理获取
本网站仅为用户提供外文OA文献查询和代理获取服务,本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文,但由于OA文献来源多样且变更频繁,仍可能出现获取不到、文献不完整或与标题不符等情况,如果获取不到我们将提供退款服务。请知悉。

摘要

[[abstract]]CrN/AlN and TiN/AlN multilayer coatings with modulation period of 4 nm and thickness ratio equal to 1.0 were manufactured by RF magnetron sputtering. Both films were annealed at temperatures of 800 °C in air for 1 h and then for an additional 9 h. Both coatings in as-deposited and after heat treatment were evaluated with a transmission electron microscope (TEM) equipped with EDS. After heat treatment at 800 °C for 1 h, a thick oxide layer around 260 nm was formed on the surface of the TiN/AlN coating. The oxide layer which formed on the coating was composed of three different regimes, including Al-enriched oxide with excess oxygen on the top surface, a crystalline Al-depleted TiO2 layer 30-80 nm thick above the nitride coating and in between, mixed nano-crystalline Al2O3 and TiO2 films. In comparison, only one oxide layer smaller than 50 nm in thickness was found in the annealed CrN/AlN coating. This amorphous or nanocrystalline oxide layer identified by EDS was a metal-deficient oxide, in which Al2O3 and Cr2O3 were mixed together forming a solid solution. As a result, the CrN/AlN coating exhibited superior stability compared to the TiN/AlN coating at elevated temperatures.
机译:通过RF磁控溅射制造调制周期为4nm且厚度比等于1.0的[[摘要] CrN / AlN和TiN / AlN多层涂层。将两个薄膜在空气中于800°C的温度下退火1小时,然后再退火9小时。使用配备EDS的透射电子显微镜(TEM)评估沉积后和热处理后的两种涂层。在800°C热处理1 h后,在TiN / AlN涂层的表面上形成了260 nm左右的厚氧化层。涂层上形成的氧化物层由三种不同的状态组成,包括富铝的氧化物,顶面上有过量的氧气,结晶的贫铝的TiO2层,其厚度在氮化物涂层上方30-80 nm以及两者之间,混合纳米-Al2O3和TiO2晶体薄膜。相比之下,在退火的CrN / AlN涂层中仅发现一个厚度小于50 nm的氧化层。通过EDS鉴定的该非晶态或纳米晶态氧化物层是金属不足的氧化物,其中Al 2 O 3和Cr 2 O 3混合在一起形成固溶体。结果,在高温下,CrN / AlN涂层与TiN / AlN涂层相比,表现出优异的稳定性。

著录项

  • 作者

    TienShih-Kang;

  • 作者单位
  • 年度 2011
  • 总页数
  • 原文格式 PDF
  • 正文语种 [[iso]]en
  • 中图分类

相似文献

  • 外文文献
  • 中文文献
  • 专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号