STUDI PEMBUATAN NANO MATERIAL INDIUM TIN OXIDE (ITO) SEBAGAI BAHAN SENSITIF SENSOR GAS CO

摘要

In this paper described the technique of making nano particles of Indium Tin Oxide (ITO) by Sol Gel method, with the composition of which varies the ratio of In: Sn = 90: 10, 70: 30 and 50: 50. ITO Pellets are made from a mixture of salt Indium In (III) and Stannum Sn (IV) in alkaline solution at a temperature (300-450 0C). Alkaline solution obtained by the addition of NH4OH solution and by mixing a solution of In(NO3)3 and SnCl4. Particle size measurements of the solid dispersed in acetone and SEM study for microstructure showed that the oxides were in the nano range ( Measurement of particles / grain is dispersed in acetone by means of SEM, with the obtained nano grain size below 100 nm. Grain size obtained ITO nano particles below 100 nm is very good for sensitive layer on the manufacture of gas sensors Carbon Monoxide (CO).