Lead barium zirconate perovskite films for electrically tunable applications

摘要

[[abstract]]Lead barium zirconate (PBZ) thin films were deposited on Pt/Ti/SiO2/Si substrates by spincoating sol-gel precursor solutions to fabricate films for electrically tunable device applications. Randomly oriented (Pb1–xBax)ZrO3 cubic perovskite films with x = 0.4, 0.6, and 0.8 were formed after heat treating at 600 °C–750 °C. The results demonstrated that the (Pb0.6Ba0.4)ZrO3 film possessed promising tunable dielectric properties as measured at 1 MHz. The (Pb0.6Ba0.4)ZrO3 film heat treated at 750 °C has a dielectric dissipation factor (tan ) of 0.007 and a dielectric tunability of 43%. The figure of merit of the (Pb0.6Ba0.4)ZrO3 film is 61.43, which is comparable with the foremost investigated (BaSr)TiO3 films.