High performance micro-crystallized TaN/SrTiO3/TaN capacitors for analog and RF applications

摘要

[[abstract]]Using micro-crystallized high-k SrTiO3 on N+-treated TaN, very high 28 fF/mum2 capacitance density, low voltage linearity (alpha) of 92 ppm/V2 and small leakage of 3times10-8 A/cm2 at 2V are beyond ITRS spec of analog capacitor at year 2018. Further improving to 44 fF/mum2 and low alpha of 54 ppm/V2 are obtained for higher speed analog/RF ICs at 2 GHz