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A CMOS-Compatible, Low-Noise ISFET Based on High Efficiency Ion-Modulated Lateral-Bipolar Conduction

机译:基于高效离子调制横向双极性导电的CMOS兼容,低噪声ISFET

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摘要

[[abstract]]Ion-sensitive, field-effect transistors (ISFET) have been useful biosensors in many applications. However, the signal-to-noise ratio of the ISFET is limited by its intrinsic, low-frequency noise. This paper presents an ISFET capable of utilizing lateral-bipolar conduction to reduce low-frequency noise. With a particular layout design, the conduction efficiency is further enhanced. Moreover, the ISFET is compatible with the standard CMOS technology. All materials above the gate-oxide are removed by simple, die-level post-CMOS process, allowing ions to modulate the lateral-bipolar current directly. By varying the gate-to-bulk voltage, the operation mode of the ISFET is controlled effectively, so is the noise performance measured and compared. Finally, the biasing conditions preferable for different low-noise applications are identified. Under the identified biasing condition, the signal-to-noise ratio of the ISFET as a pH sensor is proved to be improved by more than five times.
机译:[抽象]离子敏感场效应晶体管(ISFET)在许多应用中已成为有用的生物传感器。但是,ISFET的信噪比受到其固有的低频噪声的限制。本文提出了一种ISFET,它能够利用横向双极性传导来降低低频噪声。通过特定的布局设计,可以进一步提高传导效率。此外,ISFET与标准CMOS技术兼容。栅极氧化物上方的所有材料均通过简单的裸片级后CMOS工艺去除,从而使离子直接调节横向双极电流。通过改变栅极到本体的电压,可以有效地控制ISFET的工作模式,从而可以测量和比较噪声性能。最后,确定了适用于不同低噪声应用的偏置条件。在确定的偏置条件下,事实证明,作为pH传感器的ISFET的信噪比提高了五倍以上。

著录项

  • 作者

    Chang S.R.;

  • 作者单位
  • 年度 2012
  • 总页数
  • 原文格式 PDF
  • 正文语种 [[iso]]en
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