Design, Construction, and Utilization of Physical Vapor Deposition Systems for Medical Sensor Fabrication

摘要

The development of a novel blood glucose sensor is realized through construction of a homemade plasma coating system and utilization of semiconductor manufacturing processes in a small scale cleanroom environment. Photolithography, plasma sputtering, chemical etching and thin film measurement technologies are used in the medical sensor fabrication process. General process flow will be discussed, and system design and the plasma sputtering process will be presented as it is achieved by the system currently under development.