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Development and Implementation of Acoustic Feedback Control for Scanning Probe Microscopy

机译:扫描探针显微镜声学反馈控制的开发与实现

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摘要

A remote-sensing acoustic method for implementing position control feedback in Scanning Probe Microscopy (SPM) is presented. The capabilities of this feedback control using the new Whispering Gallery Acoustic Sensing (WGAS) method is demonstrated in a Shear-force Scanning Probe Microscope that uses a sharp probe attached to a piezoelectric Quartz Tuning Fork (QTF) firmly mounted on the microscopeu27s frame. As the QTF is electrically driven its mechanical response reaches the SPM frame which then acts as a resonant cavity producing acoustic modes measured with an acoustic sensor strategically placed on the SPM head. The novelty of the WGAS resides in using an SPM frame with a perimeter closely matching the intervening acoustic wavelength to act as a resonant cavity. The whispering gallery cavity constitutes an acoustic amplifier for the mechanical motion of the QTF probe. The observed monotonic behavior of the whispering gallery acoustic signal as a function of the probe sample distance is exploited here for tip-sample distance control with nanometer sensitivity, thus allowing topographic characterization as the probe is scanned across the sampleu27s surface. This thesis includes a description of a Labview based programming for the Field Programmable Gate Array (FPGA) card used in the automated control of the WGAS feedback microscope, a solution for improving the effective resolution of the Digital to Analog Converter (DAC) and initial results towards theoretically modeling the WGAS working principle.
机译:提出了一种在扫描探针显微镜(SPM)中实现位置控制反馈的遥感声学方法。剪切力扫描探针显微镜证明了使用新的耳语画廊声学感测(WGAS)方法的这种反馈控制功能,该显微镜将尖锐的探针连接到牢固安装在显微镜框架上的压电石英音叉(QTF)。 。当电动驱动QTF时,其机械响应到达SPM框架,然后作为谐振腔,产生共振模式,并通过策略性地放置在SPM磁头上的声学传感器进行测量。 WGAS的新颖之处在于使用SPM框架,其周长与插入的声波波长非常匹配,以充当谐振腔。回音壁腔构成用于QTF探针机械运动的声放大器。耳语回廊声信号的观察到的单调性行为随探针样本距离的变化在这里被用于具有纳米灵敏度的尖端样本距离控制,因此当探针在整个样本表面上进行扫描时可以进行形貌表征。本文包括对用于WGAS反馈显微镜的自动控制中的现场可编程门阵列(FPGA)卡的基于Labview的编程的描述,一种用于提高数模转换器(DAC)的有效分辨率和初始结果的解决方案对WGAS工作原理进行理论建模。

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