Improving selectivity on germanium CMP applications

机译：提高锗Cmp应用的选择性

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机译：由于版权限制，只有通过订阅才能访问本文的全文。

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Karagöz A.; Başım Gül Bahar;
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年度 2014
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正文语种 eng
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1. Selective area growth of germanium and germanium/silicon-germanium quantum wells in silicon waveguides for on-chip optical interconnect applications [J] . S. A. Claussen, K. C. Balram, E. T. Fei, Optical Materials Express . 2012,第10期

机译：用于芯片上光互连应用的硅波导中锗和锗/硅锗锗量子阱的选择性区域生长
2. Selective area growth of germanium and germanium/silicon-germanium quantum wells in silicon waveguides for on-chip optical interconnect applications [J] . S. A. Claussen, K. C. Balram, E. T. Fei, Optical Materials Express . 2012,第10期

机译：用于芯片上光互连应用的硅波导中锗和锗/硅锗锗量子阱的选择性区域生长
3. Controlling Germanium CMP Selectivity through Slurry Mediation by Surface Active Agents [J] . Karagoz Ayse, Basim G. Bahar ECS Journal of Solid State Science and Technology . 2015,第11期

机译：通过表面活性剂的淤浆介导控制锗CMP选择性
4. Improving Selectivity on Germanium CMP Applications [C] . Ayse Karagoz, G. Bahar Basim Chemical mechanical polishing 13 . 2014

机译：提高锗CMP应用的选择性
5. Improving per-thread performance on CMPs through timing speculation. [D] . Greskamp, Brian L. 2009

机译：通过定时推测提高CMP的每线程性能。
6. An Improved Metal-Packaged Strain Sensor Based on A Regenerated Fiber Bragg Grating in Hydrogen-Loaded Boron–Germanium Co-Doped Photosensitive Fiber for High-Temperature Applications [O] . Yun Tu, Lin Ye, Shao-Ping Zhou, 2017

机译：一种改进的基于再生光纤布拉格光栅的含氢硼-锗共掺杂光敏光纤中的金属包装应变传感器用于高温应用
7. Selective area growth of germanium and germanium/silicon-germanium quantum wells in silicon waveguides for on-chip optical interconnect applications [O] . S. A. Claussen, K. C. Balram, E. T. Fei, 2012

机译：用于片上光学互连应用的硅波导中的锗和锗/硅锗量子孔的选择性区域生长
8. Improving the Performance of Speculatively Parallel Applications on the Hydra CMP [R] . Olukotun, K. , Hammond, L. , Willey, M. 1999

机译：提高Hydra Cmp上推测并行应用的性能

Improving selectivity on germanium CMP applications

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