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High Efficiency Optical MEMS by the Integration of Photonic Lattices with Surface MEMS

机译：光子晶格与表面mEms集成的高效光学mEms

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Fleming, James G.; Lin, Shawn-Yu; Mani, Seethambal S.; Rodgers, M. Steven; Dagel, Daryl J.;
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年度 2002
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2. Optical MEMS for photonic switching-compact and stable optical crossconnect switches for simple, fast, and flexible wavelength applications in recent photonic networks [J] . Yano M., Yamagishi F., Tsuda T. IEEE journal of selected topics in quantum electronics . 2005,第2期

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3. Three-Dimensional Hybrid Integration Technology of CMOS, MEMS, and Photonics Circuits for Optoelectronic Heterogeneous Integrated Systems [J] . Lee K.-W.Noriki A.Kiyoyama K.Fukushima T.Tanaka T.Koyanagi M. Electron Devices, IEEE Transactions on . 2011,第3期

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4. High efficiency optical MEMS by the integration of photonic lattices with Surface MEMS [C] . J.G. Fleming, Seethambal Mani, Shawn-Yu Lin Conference on MOEMS and Miniaturized Systems Ⅱ Oct 22-24, 2001, San Francisco, USA . 2001

机译：通过将光子晶格与Surface MEMS集成来实现高效光学MEMS
5. Photonic crystal mirrors: Fundamental components for integrated photonic crystal optical MEMS. [D] . Kim, Sora. 2009

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6. Handheld miniature probe integrating diffuse optical tomography with photoacoustic imaging through a MEMS scanning mirror [O] . Hao Yang, Lei Xi, Sean Samuelson, 2013

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7. A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers [O] . Mojtaba Hosseinzadeh Sani, Hamed Saghaei, Mohammad Amin Mehranpour, 2020

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8. High Efficiency Optical MEMS by the Integration of Photonic Lattices with Surface MEMS [R] . Fleming, J. G., Lin, S. Y., Mani, S. S., 2002

机译：光子晶格与表面mEms集成的高效光学mEms

High Efficiency Optical MEMS by the Integration of Photonic Lattices with Surface MEMS

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