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A non-contact, thermal noise based method for the calibration of lateral deflection sensitivity in atomic force microscopy

机译:一种基于非接触热噪声的方法,用于校准原子力显微镜中的横向偏转灵敏度

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摘要

Calibration of lateral forces and displacements has been a long standing problem in lateral force microscopies. Recently, it was shown by Wagner et al. that the thermal noise spectrum of the first torsional mode may be used to calibrate the deflection sensitivity of the detector. This method is quick, non-destructive and may be performed in situ in air or liquid. Here we make a full quantitative comparison of the lateral inverse optical lever sensitivity obtained by the lateral thermal noise method and the shape independent method developed by Anderson et al. We find that the thermal method provides accurate results for a wide variety of rectangular cantilevers, provided that the geometry of the cantilever is suitable for torsional stiffness calibration by the torsional Sader method, in-plane bending of the cantilever may be eliminated or accounted for and that any scaling of the lateral deflection signal between the measurement of the lateral thermal noise and the measurement of the lateral deflection is eliminated or corrected for. We also demonstrate that the thermal method may be used to characterize the linearity of the detector signal as a function of position, and find a deviation of less than 8% for the instrument used.
机译:在横向力显微镜检查中,横向力和位移的校准一直是一个长期存在的问题。最近,Wagner等人证明了这一点。第一扭转模式的热噪声谱可用于校准检测器的偏转灵敏度。该方法快速,无损,可以在空气或液体中原位进行。在这里,我们对通过横向热噪声方法和Anderson等人开发的形状独立方法获得的横向反光杆灵敏度进行了全面的定量比较。我们发现,如果悬臂的几何形状适合通过扭转萨德法进行扭转刚度校准,则热方法可以为各种矩形悬臂提供准确的结果,可以消除或考虑悬臂的面内弯曲,并且消除或校正了在横向热噪声的测量与横向偏转的测量之间的横向偏转信号的任何缩放。我们还证明了热方法可用于表征检测器信号线性度与位置的关系,并发现所用仪器的偏差小于8%。

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  • 作者

    Mullin N.; Hobbs J.K.;

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  • 年度 2014
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  • 原文格式 PDF
  • 正文语种 en
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