Cyclic nanoindentation studies on TiN and Ti-TiN multilayer coatings deposited on Zr-based metallic glasses

摘要

Cyclic nanoindentation tests were carried out to investigate the influence of TiN and Ti-TiN multilayer coatings on the mechanical properties of Zr-based metallic glass. TiN and Ti-TiN multilayer coatings have been deposited on Zr60Ni10Cu20Al10 metallic glass substrate by RF sputtering. The deposition process was done at room temperature under nitrogen reactive gas using metallic titanium target. The two deposited coating have a thickness of 300 nm. Several cyclic nanoindentation measurements were conducted on TiN, Ti-TiN coatings deposited on Zr-based metallic glass samples at various loading rates. We have found that the coated metallic samples shows higher mechanical properties such as hardness and reduced elastic modulus compared to the bulk metallic glass substrate. Furthermore, the designed experiments shows a difference in the deformation behaviour of the samples, as being analysed through the obtained load-displacement curves with the AFM pictures of the residual indentation imprints. The effect of the loading rate on the deformation behaviours of these samples was also discussed in this work.