Measurements of thermophysical property of thin films by light pulse heating thermoreflectance methods

摘要

Thermoreflectance methods by picosecond pulse heating and by nanosecond pulse heating have been developed under the same geometrical configuration as the laser flash method by the National Metrology Institute of JAPAN, AIST. Using these light pulse heating methods, thermal diffusivity of each layer of multilayered thin films and boundary thermal resistance between the layers can be determined from the observed transient temperature curves based on the response function method. The measurement results of various thin films as transparent conductive films used for flat panel displays, hard coating films and multilayered films of the next generation phase-change optical disk will be presented.