A physical analysis model of a surface acoustic wave (SAW) motor which is driven by frictional force resulted in nano meters elastic vibration has been proposed. In case of the SAW motor, the vibraition ampllitude is from several nano meters to 30 nm at most. The vibraion amplitude is almost same as the elastic deformation caused by preload between a slider and stator. In the analysis model, the elastic defomation, stick and slip were considered. Dynamic simulation was carried out successfuly. Experimental results of 9.6 MHz opration frequency SAW motor were compared to the simulation results. It was understood that smaller slider projection slider with a lot of projections has high contact surface stiffness, so that superior performances are obtained in speed and thrust.
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