Modeling of flexible non-linear dynamic links in Nano-Positioning Motion Systems

摘要

This paper presents the modelling of the dynamics of a cable schlepp, connected to two moving stages, using a nonlinear finite element formulation. The dynamical behaviour of a cable schlepp is non-linear due to the large relative motion of the stages connected to the cable schlepp and the incorporation of end-stops that include contact behaviour. An overview of the finite element formulation is given, including the method with which the initial geometry of the cable schlepp is computed from an un-deformed shape. It is shown how the dynamic parameters of the cable schlepp have been determined; both on the basis of the CAD design and experimentally. The model of the cable schlepp is verified by a set of experiments that have been carried out with both the model and the actual system. The dynamics of the model are in good agreement compared to the dynamics derived with the machine measurements