Compact integrated optical devices for optical sensor and switching applications

摘要

This thesis describes the design, fabrication, and characterization of compact opticaluddevices for sensing and switching applications. Our focus has been to realize the devicesudusing CMOS-compatible fabrication processes. Particularly the silicon photonicsudfabrication platform, ePIXfab, has been used for this purpose. There are high hopes thatudsilicon photonics, by utilizing the CMOS processing tools and standardized fabricationudprocesses, can reduce the cost of photonic integrated circuits and open new markets toudthis technology-driven field of research.