Focused ion beam nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides

摘要

We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.