Development of micromegas-like gaseous detectors using a pixel readout chip as collecting anode

摘要

This thesis reports on the fabrication and test of a pixel readout gaseous detectorformed by a Micromegas amplication grid integrated on a CMOS pixel readoutchip by microelectronic techniques. This very high granularity low-mass detectorcalled GridPix provides single electron sensitivity and can be fabricated by postprocessingof pixel chip wafers.