Micro Coriolis mass flow censor with extended range for a monopropellant micro propulsion system

摘要

We have designed and realised a micromachined micro Coriolis flow sensor for the measurement of hydrazine (N2H4, High Purity Grade) propellant flow in micro chemical propulsion systems. The sensor should be able to measure mass flow up to 6 mg/s for a single thruster or up to 24 mg/s for four thrusters. The sensor will first be used for measurement and characterisation of the micro thruster system in a simulated space vacuum environment. Integration of the sensor chip within the micro thruster flight hardware will be considered at a later stage. The new chip has an increased flow range because of an integrated on-chip bypass channel. First measurement results have demonstrated an increase in flow range which corresponds well to the designed bypass ratio.