Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application

摘要

A design is presented for a large force (0.5 mN) high precision MEMS clamping mechanism. The clamp is part of a MEMS TEM sample manipulator, which needs to be fixed un-powered once positioned. The elastic deformation of the clamp suspension has been optimized to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing force for deformation and thus the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact and optimal design.