BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications

摘要

In this paper an xy-stage is fully characterised statically as well as dynamically. It is concluded that the axial stress in the beam is the major non-linear effect. Finite element analysis such as COSMOS is used for the validation of the linear mechanical models. Good conformity between theory and simulation is observed. As a result, mathematical programs such as MATHCAD are now sufficient to predict the mechanical behaviour of structures. This has the advantage that parameters of structures can be altered much easier and faster. After optimisation, xy-stages are developed for their use in scanning probe microscopy. Experiments of devices operated in open air and even under fluid show good agreement with theories.