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Statistical relation between particle contaminations in ultra pure water and defects generated by process tools

机译：超纯水中颗粒污染与加工工具产生的缺陷之间的统计关系

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Ultra pure water supplied inside the Fab is used in different tools at different stages of processing. Data of the particles measured in ultra pure water was compared with the defect density on wafers processed on these tools and a statistical relation is found.

机译：Fab内部提供的超纯水在处理的不同阶段用于不同的工具。将在超纯水中测得的颗粒数据与在这些工具上处理过的晶圆上的缺陷密度进行比较，发现了统计关系。

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Wali Faisal; Knotter D. Martin; Wortelboer Ronald; Mud Auke;
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年度 2007
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原文格式 PDF
正文语种 {"code":"en","name":"English","id":9}
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Statistical relation between particle contaminations in ultra pure water and defects generated by process tools

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