In this paper, we present the design, fabrication and characterization of a novel gas microvalve realized by combining micro- and fine-machining techniques. The design is for high flow rates at high pressure differenceudbetween inlet and outlet, burst pressure of up to 15 bars. There is no power consumption required for the valve to maintain its position during operationudin any intermediate state and the process gas does not interact with the actuation mechanism. The microvalve was experimentally characterized with air flows. It is shown that flow rates of 220 ml min$^{−1}$ at a pressure difference of 4 bars could be achieved with a minimum accurate flow rate of 4 ml min$^{−1}$.ud
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机译：在本文中，我们介绍了通过组合微细加工技术实现的新型气体微阀的设计，制造和表征。该设计适用于高流量，入口和出口之间的压差高，破裂压力高达15巴。在任何中间状态下，阀门在操作期间保持其位置都不需要消耗功率，并且过程气体不会与致动机构相互作用。该微型阀通过气流进行了实验表征。结果表明，在4 bar的压差下，可以实现220 ml min $ ^ {-1} $的流速，而最小准确流速为4 ml min $ ^ {-1} -1。
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