A compact micro Coriolis mass flow sensor with flow bypass for a monopropellant micro propulsion system

摘要

We have designed, fabricated and tested a micromachined Coriolis flow sensor for the measurement of hydrazine (N2H4) propellant flow in a micro chemical propulsion system (uCPS). The sensor will be used for measurement and characterization of the uCPS in a simulated space vacuum environment. To reach the required flow range a bypass system is integrated. Initial measurements demonstrate an increase of the flow range in accordance with the designed bypass ratio. The sensor is operated as a two-port resonator in an oscillator circuit to improve frequency stability.