In this paper, an analytical expression is presented for the cell constant of planar-interdigitated electrodes used as electrolyte conductivity sensors. The result of this expression is compared with results of measurement carried out with several differently shaped planar probes provided with a thin Ta2O5 insulating film, showing good agreement. More than 10 different devices have been fabricated with predicted cell constants ranging from 0.14 to 4.44 cm¿1. The measured cell constants are typically 10¿20% smaller, possibly due to fringing effects.
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